Ministerio de Ciencia, Innovación y Universidades - Gobierno de España

Ministry of Science, Innovation and Universities

Unique Scientific and Technical Infrastructures (ICTS)

Unique Scientific and Technical Infrastructures Map (ICTS)

National Centre for Electron Microscopy (CNME)

This distributed ICTS is composed of the Integrated Clean Room for Micro and Nano Fabrication of the National Microelectronics Centre of the CSIC, located in Barcelona, the Centre for Technology of the Institute of Optoelectronics Systems and Microtechnology of the UPM, located in Madrid, and the Micro-Nanofabrication Infrastructure at the Nanophotonics Technology Center of the UPV, located in Valencia. The three infrastructure sites are coordinated to provide services to the entire scientific community in the fields of Microelectronics, Optoelectronics, and Nanophotonics. Together, they offer more than 2,000m2 of clean rooms (types 10-100-10,000) to the scientific community and industry, along with associated laboratories for encapsulation and systems and devices characterization.

ICTS-CNME management is supervised by General Foundation of the UCM and the Vice-rectory for Scientific Research and Policy (UCM), which are responsible for its maintenance, providing all the technical and human resources necessary for its proper operation. It is located at the Chemistry Department of the UCM. The CNME main goals are development, implementation and availability of the most advanced electronic microscopy techniques and methods, allowing for the observation, analysis, characterization and manipulation of organic and inorganic materials at the atomic level. It includes a wide range of transmission, scanning, electron probe microanalyzers and atomic force microscopy devices, and it is equipped with last generation aberration corrected microscopes. The presence of two particular microscopes provided with the most advanced technology currently available makes this facility remarkably relevant: An ARM 200cFEGprobe corrected and equipped with last generation analytic techniques and another ARM 300cFEG device image corrected with a resolution of 0.05 nm. These two microscopes are supported by advanced SEM microscopes as well as various SEM/TEM devices for a full structural and compositional characterization prior to the sub-Angstrom analysis.

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