This distributed ICTS is composed of the Integrated Clean Room for Micro and Nano Fabrication of the National Microelectronics Centre of the CSIC, located in Barcelona, the Centre for Technology of the Institute of Optoelectronics Systems and Microtechnology of the UPM, located in Madrid, and the Micro-Nanofabrication Infrastructure at the Nanophotonics Technology Center of the UPV, located in Valencia. The three infrastructure sites are coordinated to provide services to the entire scientific community in the fields of Microelectronics, Optoelectronics, and Nanophotonics. Together, they offer more than 2,000m2 of clean rooms (types 10-100-10,000) to the scientific community and industry, along with associated laboratories for encapsulation and systems and devices characterization.
NF-NTC is a facility owned by the UPVLC and is located in the Vera Campus. It began operations at the end of 2009, offering nanofabrication services. NF-NTC has a complete 150 mm-wafer CMOS production line located in a clean room of 500 m2 that includes the following technology: optical lithography (mask aligners and a DUV stepper) and direct-writing (electron-beam based), photoresist coating and developer, both dielectrics and metal depositions, chemical etching (wet and dry), ion implantation, etc. Besides, it contains a complete laboratory for the assembly and encapsulation of integrated photonic components, laboratories for physical and optical characterization of devices, and a laboratory for the characterization of systems and optical networks. The facility offers rapid prototyping nanofabrication services to research groups (basic and applied) and technology companies that may require its services. These services include from consultancy design services for specific photonic devices, or complete solutions based on integrated photonics of silicon, to specific CMOS step processes or a complete manufacture of a passive or active silicon photonic device. In addition, physical and optical characterization processes are also carried out on the devices or structures manufactured.