Ministry of Science, Innovation and Universities

Unique Scientific and Technical Infrastructures (ICTS)

Unique Scientific and Technical Infrastructures Map (ICTS)

Integrated Clean Room for Micro and Nano-fabrication of the National Microelectronic Centre of the CSIC (SBCNM)

This distributed ICTS is composed of the Integrated Clean Room for Micro and Nano Fabrication of the National Microelectronics Centre of the CSIC, located in Barcelona, the Centre for Technology of the Institute of Optoelectronics Systems and Microtechnology of the UPM, located in Madrid, and the Micro-Nanofabrication Infrastructure at the Nanophotonics Technology Center of the UPV, located in Valencia. The three infrastructure sites are coordinated to provide services to the entire scientific community in the fields of Microelectronics, Optoelectronics, and Nanophotonics. Together, they offer more than 2,000m2 of clean rooms (types 10-100-10,000) to the scientific community and industry, along with associated laboratories for encapsulation and systems and devices characterization.

This infrastructure is devoted to the development and application of innovative technologies in the field of Microelectronics and other Micro/Nano components. Since its creation in 1991, it has belonged to the CSIC and is managed as part of the Institute for Microelectronics of Barcelona, of the National Microelectronics Centre. The SBCNM is an open-access facility with the objective of providing support to national and international research groups as well as industry in order to carry out R&D&I based on a complete set of micro and nanotechnologies and processes of manufacture located in a highly-specialised clean environment (1,500 m2). Led by a team of experts, and thanks  to operational procedures and the reliability and repetitiveness of the processes, this infrastructure also provides services to companies, from the technology dissemination and training to small series of device prototypes, circuits, and systems based on micro and nanotechnologies. The range of applications covered by the SBCNM is very wide, including biomedicine, environment, food, energy, mobility, security, communications, consumer electronics, etc. For these applications the main implementations offered by the SBCNM are semi-conductor devices, including power devices and radiation detectors, sensors, actuators and MEMS, nanoscale actuators and devices, Lab-on-Chip Systems, and polymeric devices.

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