
The Micro and Nano Fabrication Infrastructure of the Nanophotonics Technology Centre of Valencia (INF-NTC), attached to the Polytechnic University of Valencia (UPV) is a distributed facility of the ICTS MICRONANOFABS together with the Integrated Micro and Nano Fabrication Clean Room of the National Microelectronics Centre of the Spanish National Research Council (CSIC) and the Technology Centre of the Institute of Optoelectronic Systems of the Polytechnic University of Madrid (CT-ISOM). The INF-NTC facilities include a complete chain of silicon micro/nanofabrication equipment for processing both photonic and electronic devices and structures derived from silicon. It also contains a 500 m2 class 10-100-10000 clean room, laboratories and facilities for physical, optical and electrical characterisation.